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Stokes
WAFERSKAN Ellipsometer LSE-WS |
The model LSE-WS
Stokes WAFERSKAN Ellipsometer is a high speed film thickness mapping
system measuring one site per second including stage travel! It uses
patented StokesMeter™ technology to give tilt-free, focus free, 2D/3D
color thickness and index maps on any size wafer up to 300mm. Easy to
use and affordably priced under $50K in the USA, the LSE-WS is a
outstanding value in a high precision imaging ellipsometer.
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Stokes
Ellipsometer LSE |
The model LSE
Stokes Ellipsometer is based on advanced StokesMeter™ technology (winner of
Photonics Spectra and R&D 100 best new products awards). The unit's
basic design offers unprecedented ease of use, precision and instantaneous
measurement at a cost under $20K in the USA.
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Stokes
Ellipsometer LSE-Traveler |
The LSE –TRAVELER is designed to be shipped or checked as airline
luggage, the rugged LSE-TRAVELER fits into a airline safe foam filled
travel case together with sample table and a PCMCIA interfaced
notebook computer that is ready for measurement right out of the case.
Under $28K
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Variable
Angle Stokes WAFERSKAN
Ellipsometer L115S300 |
The L115S300 Stokes WAFERSKAN Ellipsometer's high speed film
thickness mapping system measures 49 sites in 49 seconds! It is a
fast instrument for thin film visualization giving tilt-free, focus-free,
automatic 2D/3D color thickness and index images of the sample
surface.
The model L115S300
maps up to 300mm wafers.
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Variable Angle
Stokes Ellipsometer L116S300 |
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The L116S300 with a manual hand positioning stage makes measurements of film
thickness and film refractive index in milliseconds. The variable
angle capability determines thicker film thickness and gives refractive index
measurements over a wider thickness range. The unit is upgradeable to WAFERSKAN, Two
and Three Wavelength.
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In Situ
Stokes Ellipsometer L104ST |
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The
model L104ST is a super fast, reliable, no moving parts ellipsometer
that is
ideal for measuring the rapid growing or etching of films in situ within your
reactor. Get precise real time measurements of early film growth on a bare
substrate to sub-angstrom precision. Determine the exact end point during an etch.
Polarizer and analyzer modules mount onto window flanges outside your CVD,
electron-beam, MBE, sputtering reactor or chamber. Priced at $36K in the
USA.
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Multiwavelength
Ellipsometers L2W & L3W |
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The Two
& Three Wavelength Ellipsometers use laser sources to analyze difficult to measure
films. They give refractive index results in near
period regions, and measure the thickness of thicker films, and offer
many of the advantages of
spectroscopic ellipsometers without the complexity. Priced from $35K in
the USA.
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IR
Ellipsometers |
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The Two
& Three Wavelength IR Ellipsometers use 1550 nm IR together with
visible laser sources to measure films like amorphus silicon and
polysilicon layers that are highly absorbing or even opaque to visible
light. They give refractive index results in near
period regions, and measure the thickness of thicker films, and offer
many of the advantages of
spectroscopic ellipsometers without the complexity. Priced from $65K in
the USA.
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Variable
Angle Manual Ellipsometer L117F300 |
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The model L117F300 is a
variable angle traditional manual nulling ellipsometer. Measurements are made in minutes by manually rotating the polarizer
and analyzer drums then entering the readings into a PC. The variable
angle type frame structure
permits this model to be factory upgraded to a Automatic, WAFERSKAN, or
Multiwave ellipsometer. Priced under $25K in the USA.
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Wafer
Handler L115WH |
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The
model L115WH Wafer Handler permits unattended automatic measurement of
up to 25 wafers from a cassette. The random access indexer on the
Wafer Handler is ultra clean with the mechanism fully contained within
the housing so there are no moving parts near the wafer. The motion of the arm is
reliable, clean and
gentle.
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Software
- Upgrades for Windows VISTA/XP/2000 |
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Software
and hardware interface upgrades are available for older ellipsometer
models L116, A, B, and C. Software programs LGEMP and LMOD for Windows
VISTA/XP/2000 give enhanced ellipsometer
performance. WAFERSKAN models L115 type can
be upgraded to IBM PC or compatible Pentium computers for 2D/3D color
mapping and imaging. Prices range from $975 to $4K depending on
upgrade.
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