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software upgrades
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LGEMP - Gaertner Ellipsometer Measurement
Program |
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LGEMP Windows software is versatile and can
measure single layer films such as oxides, nitrides and photoresists
as well the top layer on a known 1, 2, or 3 layer stack such as poly
on oxide and oxide on poly on oxide. The LGEMP program requires
an L116, A, B, C, D or S type ellipsometer running Windows
VISTA/XP/2000 software. Also, it can be used with our
2 and 3 wavelength ellipsometer models. Price $975.
more information
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LMOD - Four Layer Modeling Program |
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Our LMOD Windows modeling software permits the
simultaneous computation of film thickness, index and adsorption
values in a single, two, three or four layer film stack. The Windows
VISTA/XP/2000 software
is flexible permitting any of the 14 substrate or film parameters to
be solved for or fixed using computational routines developed by NIST.
Price $975.
more information
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upgrade packages
Older ellipsometer models such as the L116 type with Hewlett Packard Basic
or DOS computers can be upgraded to LGEMP software running on WINDOWS
VISTA/XP/2000. WAFERSKAN models L115A and L115B with Hewlett
Packard computers can be upgraded to WINDOWS computers for
2D/3D Color Maps. The ellipsometer must be in good mechanical working condition
as software alone cannot correct hardware issues. Upgrade packages can be
returned for a full refund less shipping costs within 30 days if not
satisfied for any reason.
L116 series ellipsometer upgrades
L116UG – WIN
Upgrade Kit consists of a PCI interface card, interface cable, and
Windows VISA/XP/2000 LGEMP software. The PCI interface card is a standard half
size card that is inserted in any available PCI interface slot in your
Windows computer.
An interface cable connects the interface card to the ellipsometer. Identify
the cable
connector on your ellipsometer. The
L116 - WIN Upgrade Kit price is $2,995.
L115 series ellipsometer upgrades
  
L115UG - WIN
The Upgrade Kit consists of two PCI interface cards, interface cables, and
2D/3D Color Mapping software for Windows VISA/XP/2000. A CC1.2 or MM3000 Controller is
required for use with the Upgrade. The old model TL17
Controller (supplied
prior to 1982) cannot be controlled by the PC. The L115UG - WIN Upgrade
Kit price is $3,995.
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