Stokes Laser Ellipsometers

Stokes Laser Ellipsometers give non-contact thickness and refractive index measurements of thin transparent and semi transparent films to sub-angstrom precision. Unlike other ellipsometers with filtered sources, Stokes Ellipsometers utilize a stable spectrally precise HeNe Gas laser to obtain the complete state of polarization of the measuring beam providing exceptional accuracy and precision. Gaertner has helped pioneer ellipsometry offering high precision Stokes laser ellipsometers  for routine measurements in the semiconductor, solar, chemical, biological and other thin film industries. They are a easy to use popular and affordable alternative to overly complicated less precise spectroscopic ellipsometers.

Stokes Laser Ellipsometer LSE-USB

Convenient USB interface uses advanced StokesMeter™ technology to make film thickness measurements. Previous winner of Photonics Spectra and R&D 100 best new products awards, the unit's simple design offers unprecedented ease of use, precision and instantaneous routine measurement at an affordable price.

Stokes Microspot Laser Ellipsometer

Stokes Microspot Laser Ellipsometer LSE-MS

offers a 15 micron measuring laser beam diameter, manual  2x2 inch micrometer positioning stage and a CCD camera for viewing the area of measurement on your PC. Areas as small as 15 X 45 micron can be routinely measured using advanced StokesMeter technology.

Stokes WAFERSKAN Laser Ellipsometer
LSE-WS

is a high speed film thickness mapping system measuring one site per second including stage travel! It uses advanced StokesMeter™ technology to give tilt-free, focus free, 2D/3D color thickness and index maps on any size wafer up to 300mm. Easy to use and affordably priced, the LSE-WS is a popular choice in a high precision scanning ellipsometer.

Multiwavelength Laser Ellipsometers L2W & L3W

Two and Three Wavelength Ellipsometers use  laser sources to analyze difficult films. They give refractive index results in near period regions, and measure the thickness of thicker films, and offer many of the advantages of spectroscopic ellipsometers without the complexity and cost.

Variable Angle Stokes WAFERSKAN Ellipsometer L115S300

The L115S300 Stokes WAFERSKAN Ellipsometer's high speed film thickness mapping system measures 49 sites in 49 seconds! It is a fast instrument for thin film visualization giving tilt-free, focus-free, automatic  2D/3D color thickness and index images of the sample. The model L115S300 maps up to 300mm wafers.

Variable Angle Stokes Laser Ellipsometer L116S300

The L116S300 with a manual hand positioning stage makes measurements of film thickness and film refractive index in milliseconds. The variable angle capability determines thicker film thickness and gives refractive index measurements over a wider thickness range.

Pre-Owned Laser Ellipsometers

Factory refurbished, upgraded and sold with a full 1 year warranty. A pre-owned ellipsometer available at a substantially lower price is a good option for a company or university on a limited budget. Check availability on these value ellipsometers.

Software & USB ellipsometer Upgrades for Windows

Software and USB interfaced upgrades are available for older Gaertner ellipsometer models LSE, L116, and L115. Software programs LGEMP and LMOD for Windows give enhanced ellipsometer performance. WAFERSKAN models L115 type can be upgraded to Windows for 2D/3D color mapping and visualization.

NIST Traceable Calibration Standards for Ellipsometers

Gaertner provides silicon wafers with a thermally grown silicon dioxide film which permit ellipsometers to be calibrated so they can operate in top condition.